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Error Calculating Defelection Matrix

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I am having a hard time calibrating my tips and keep getting the Error Calculating Deflection Matrix every time I calibrate. I did change the lowforce to 0.2 on my opt probe settings. It was set at 0.1 and the probe kept stopping at the tooling ball. How do I get rid of this error so I can calibrate my probes? I did search the forum for this topic and nothing seems to help. Attached are two photos to help better illustrate what my settings are. I am using a Leitz LSPX1S scanning probe. Thanks.

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